Title :
Development of magnetic levitated stage for wide area movements
Author :
Jeon, Jeong-Woo ; Caraiani, Mitica ; Kim, Yong-Joo ; Oh, Hyeon-Seok ; Kim, Sung-Shin
Author_Institution :
Korea Electrotechnol. Res. Inst., Changwon
Abstract :
This paper proposes a magnetic levitation system without other assistant devices that can move in wide area (< 300times300 mm2) as well as in high precision (< plusmn100 nm).
Keywords :
magnetic levitation; magnetic levitation system; wide area movements; Electrical equipment industry; Industrial control; Magnetic flux; Magnetic levitation; Magnetic separation; Permanent magnet motors; Permanent magnets; Position control; Stators; Traction motors;
Conference_Titel :
Electrical Machines and Systems, 2007. ICEMS. International Conference on
Conference_Location :
Seoul
Print_ISBN :
978-89-86510-07-2
Electronic_ISBN :
978-89-86510-07-2
