DocumentCode :
468871
Title :
Displays, Sensors, and MEMS - RF MEMS
Author :
Weber, Werner ; Friedman, Thomas A.
Author_Institution :
Infineon Technologies AG
fYear :
2007
fDate :
10-12 Dec. 2007
Firstpage :
409
Lastpage :
409
Keywords :
CMOS technology; Circuits; Displays; Laboratories; Micromechanical devices; Oscillators; Radio frequency; Radiofrequency microelectromechanical systems; Silicon; Switches;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices Meeting, 2007. IEDM 2007. IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4244-1507-6
Electronic_ISBN :
978-1-4244-1508-3
Type :
conf
DOI :
10.1109/IEDM.2007.4418959
Filename :
4418959
Link To Document :
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