• DocumentCode
    468881
  • Title

    Process Technology - Advanced Process & Integration Technology

  • Author

    De Salvo, Barbara ; Lee, Tze-Liang

  • Author_Institution
    CEA/LETI
  • fYear
    2007
  • fDate
    10-12 Dec. 2007
  • Firstpage
    675
  • Lastpage
    675
  • Keywords
    CMOS technology; Dielectric devices; Electrodes; Epitaxial growth; Field programmable gate arrays; FinFETs; Paper technology; Substrates; Thin film devices; Tin;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 2007. IEDM 2007. IEEE International
  • Conference_Location
    Washington, DC
  • Print_ISBN
    978-1-4244-1507-6
  • Electronic_ISBN
    978-1-4244-1508-3
  • Type

    conf

  • DOI
    10.1109/IEDM.2007.4419035
  • Filename
    4419035
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=468881