DocumentCode :
46890
Title :
High Aspect Ratio Magnetoimpedance Sensors Fabricated by Micromolding
Author :
Cortes, M. ; Tao Peng ; Woytasik, M. ; Moulin, J.
Author_Institution :
Inst. d´Electron. Fondamentale, Univ. Paris-Sud, Orsay, France
Volume :
51
Issue :
1
fYear :
2015
fDate :
Jan. 2015
Firstpage :
1
Lastpage :
4
Abstract :
Multilayered magnetoimpedance sensors have been fabricated using micromolding of NiFe and Cu films with thicknesses up to 10 μm. The influence of a transverse field annealing has been studied. Variation of ΔZ/Zsat of 170% and sensitivity of 4.4%/Oe have been obtained for a 50 μm wide and 20 μm thick sensor at frequencies in the range of 1 MHz. Using the resonance between the sensor and an external capacitance, sensitivity of 7200 Ω/T has been reached at high frequencies.
Keywords :
Permalloy; copper; electric impedance; magnetic annealing; metallic thin films; microfabrication; microsensors; moulding; thin film sensors; Cu; NiFe; frequency 1 MHz; high aspect ratio; micromolding; multilayered magnetoimpedance sensor fabrication; resonance; size 20 mum; size 50 mum; transverse field annealing; Magnetic domains; Magnetic multilayers; Magnetic sensors; Perpendicular magnetic anisotropy; Sensitivity; Magnetic microsensor; magnetoimpedance (MI); micromolding; permalloy;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/TMAG.2014.2356718
Filename :
7029200
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=46890
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