High Aspect Ratio Magnetoimpedance Sensors Fabricated by Micromolding

Author

Cortes, M. ; Tao Peng ; Woytasik, M. ; Moulin, J.

Author_Institution

Inst. d´Electron. Fondamentale, Univ. Paris-Sud, Orsay, France

Volume

51

Issue

1

fYear

2015

fDate

Jan. 2015

Firstpage

1

Lastpage

4

Abstract

Multilayered magnetoimpedance sensors have been fabricated using micromolding of NiFe and Cu films with thicknesses up to 10 μm. The influence of a transverse field annealing has been studied. Variation of ΔZ/Z_sat of 170% and sensitivity of 4.4%/Oe have been obtained for a 50 μm wide and 20 μm thick sensor at frequencies in the range of 1 MHz. Using the resonance between the sensor and an external capacitance, sensitivity of 7200 Ω/T has been reached at high frequencies.

Keywords

Permalloy; copper; electric impedance; magnetic annealing; metallic thin films; microfabrication; microsensors; moulding; thin film sensors; Cu; NiFe; frequency 1 MHz; high aspect ratio; micromolding; multilayered magnetoimpedance sensor fabrication; resonance; size 20 mum; size 50 mum; transverse field annealing; Magnetic domains; Magnetic multilayers; Magnetic sensors; Perpendicular magnetic anisotropy; Sensitivity; Magnetic microsensor; magnetoimpedance (MI); micromolding; permalloy;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2014.2356718

Filename

7029200