Title :
Design and analysis of resonant based gas sensor
Author :
Uma, G. ; Umapathy, M. ; Vidhya, L. Baby ; Maya, M. ; Sophia, T. ; Tamilarasi, K.
Author_Institution :
Nat. Inst. of Technol., Tiruchirappalli
Abstract :
This paper presents modeling and simulation of micro cantilever based resonant sensor which uses piezoelectric excitation and detection. Length and width analysis is carried out for maximum displacement at resonance. The proposed design is tested for mass sensitiveness, with conditioning electronics using Coventorware.
Keywords :
gas sensors; microsensors; conditioning electronics; gas sensor; mass sensitiveness; micro cantilever; piezoelectric excitation; resonant sensor; Analytical models; Chemical sensors; Computational modeling; Frequency measurement; Gas detectors; Micromechanical devices; Platinum; Resonance; Resonant frequency; Structural beams; Coventorware; Piezoelectric; Resonant sensor;
Conference_Titel :
Sensors Applications Symposium, 2008. SAS 2008. IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
978-1-4244-1962-3
Electronic_ISBN :
978-1-4244-1963-0
