Title :
Electrical and Microstructural Investigation into the Effect of Arsenic Emitter Concentration on the Enhanced Gain Polysilicon Emitter Bipolar Transistor
Author :
Wilson, M.C. ; Hunt, P.C. ; Jorgensen, N. ; Booker, G.R.
Author_Institution :
Plessey Research(Caswell)Ltd., Caswell, Towcester, Northants, England, NN12 8EQ
Keywords :
Annealing; Bipolar transistors; Electrical resistance measurement; Grain size; Hafnium; Ion implantation; Microstructure; Oxidation; Rough surfaces; Silicon;
Conference_Titel :
VLSI Technology, 1985. Digest of Technical Papers. Symposium on
Conference_Location :
Kobe, Japan
Print_ISBN :
4-930813-09-3
