DocumentCode :
472655
Title :
Submicron Optical Contrast Enhanced Lithography Using Water-Soluble Materials
Author :
Sasago, M. ; Endo, M. ; Ogawa, K. ; Hirai, Y. ; Nomura, N. ; Ohzone, T. ; Ishihara, T.
Author_Institution :
Semiconductor Research Center Matsushita Electric Ind. Co., Ltd. Moriguchi-shi, Osaka, 570 Japan
fYear :
1985
fDate :
14-16 May 1985
Firstpage :
76
Lastpage :
77
Keywords :
Biological materials; Biomedical optical imaging; Chemicals; Lithography; Optical materials; Optical sensors; Photobleaching; Resists; Sequences; Weight control;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Technology, 1985. Digest of Technical Papers. Symposium on
Conference_Location :
Kobe, Japan
Print_ISBN :
4-930813-09-3
Type :
conf
Filename :
4480311
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=472655
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