Title :
Electrical Characteristics of Isolation-Merged Vertical Capacitor (IVEC) Cell
Author :
Morie, T. ; Minegishi, K. ; Nakajima, Shigeru ; Miura, K.
Author_Institution :
Atsugi Electrical Communication Laboratory, Nippon Telegraph and Telephone Public Corporation Atsugi-shi, Kanagawa 243-01, Japan
Keywords :
Boron; Capacitors; Electric variables; Electrodes; Laboratories; Leakage current; Niobium; Telegraphy; Testing; Threshold voltage;
Conference_Titel :
VLSI Technology, 1985. Digest of Technical Papers. Symposium on
Conference_Location :
Kobe, Japan
Print_ISBN :
4-930813-09-3
