Title :
Scaling CMOS Technologies with Constant Latch-Up Immunity
Author :
Lewis, Alan G. ; Martin, Russel A. ; Huang, Tiao Y. ; Chen, John Y. ; Bruce, Richard H.
Author_Institution :
Xerox, Palo Alto Research Center, 3333, Coyote Hill Road, Palo Alto, CA 94304
Keywords :
Bipolar transistors; CMOS technology; Circuits; Critical current; Doping; Epitaxial layers; Geometry; Substrates; Testing; Very large scale integration;
Conference_Titel :
VLSI Technology, 1986. Digest of Technical Papers. Symposium on
Conference_Location :
San Diego, CA, USA
