DocumentCode
472691
Title
A New Bird´s Beak Free Isolation Technology
Author
Ohya, S. ; Narita, Y. ; Kikuchi, M.
Author_Institution
NEC Corporation Sagamihara, Kanagawa 229, Japan
fYear
1986
fDate
28-30 May 1986
Firstpage
31
Lastpage
32
Keywords
Boron; Diodes; Etching; Isolation technology; Oxidation; P-n junctions; Plasma applications; Plasma devices; Semiconductor films; Solid state circuits;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1986. Digest of Technical Papers. Symposium on
Conference_Location
San Diego, CA, USA
Type
conf
Filename
4480355
Link To Document