DocumentCode :
472691
Title :
A New Bird´s Beak Free Isolation Technology
Author :
Ohya, S. ; Narita, Y. ; Kikuchi, M.
Author_Institution :
NEC Corporation Sagamihara, Kanagawa 229, Japan
fYear :
1986
fDate :
28-30 May 1986
Firstpage :
31
Lastpage :
32
Keywords :
Boron; Diodes; Etching; Isolation technology; Oxidation; P-n junctions; Plasma applications; Plasma devices; Semiconductor films; Solid state circuits;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Technology, 1986. Digest of Technical Papers. Symposium on
Conference_Location :
San Diego, CA, USA
Type :
conf
Filename :
4480355
Link To Document :
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