Title :
A New Bird´s Beak Free Isolation Technology
Author :
Ohya, S. ; Narita, Y. ; Kikuchi, M.
Author_Institution :
NEC Corporation Sagamihara, Kanagawa 229, Japan
Keywords :
Boron; Diodes; Etching; Isolation technology; Oxidation; P-n junctions; Plasma applications; Plasma devices; Semiconductor films; Solid state circuits;
Conference_Titel :
VLSI Technology, 1986. Digest of Technical Papers. Symposium on
Conference_Location :
San Diego, CA, USA
