DocumentCode :
472725
Title :
Double Diffraction Alignment Method Using Checker Grating
Author :
Tabata, M. ; Tojo, T.
Author_Institution :
VLSI Research Center, Toshiba Corporation 1, Komukai-Toshiba-cho, Saiwai-ku, Kawasaki, 210, Japan
fYear :
1987
fDate :
22-23 May 1987
Firstpage :
11
Lastpage :
12
Keywords :
Diffraction gratings; Interferometric lithography; Lenses; Optical detectors; Optical diffraction; Optical interferometry; Optical sensors; Resists; Signal detection; Signal processing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Technology, 1987. Digest of Technical Papers. Symposium on
Conference_Location :
Karuizawa, Japan
Type :
conf
Filename :
4480397
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=472725
