Title :
Analysis and Solution of a Yield-Limiting Patterned-Fail Mechanism in a 1 Mbit DRAM
Author :
Nowak, E.J. ; Trickle, W.M.
Author_Institution :
IBM General Technology Division Essex Junction, Vermont 05452
Keywords :
Condition monitoring; Current measurement; Electric breakdown; FETs; Failure analysis; Pattern analysis; Phased arrays; Random access memory; Tail; Voltage;
Conference_Titel :
VLSI Technology, 1987. Digest of Technical Papers. Symposium on
Conference_Location :
Karuizawa, Japan
