Title :
Thin-Base Bipolar Technology by Low-Temperature Photo-Epitaxy
Author :
Sugii, T. ; Yamazaki, T. ; Fukano, T. ; Ito, T.
Author_Institution :
Fujitsu Laboratories Ltd. Atsugi 10-1, Morinosato-wakamiya, Atsugi 243-01, Japan
Keywords :
Bipolar transistors; Boron; Doping; Electrodes; Epitaxial growth; Epitaxial layers; Fabrication; Substrates; Temperature dependence; Very large scale integration;
Conference_Titel :
VLSI Technology, 1987. Digest of Technical Papers. Symposium on
Conference_Location :
Karuizawa, Japan