Title :
A Folded Resistor and Capacitor (FRC) Static Memory Cell with Triple Poly-Si Structures
Author :
Yamanaka, Toshiaki ; Hashimoto, Naotaka ; Kawamoto, Yoshifumi ; Sakai, Yoshio ; Honjo, Shigeru ; Minato, Osamu
Author_Institution :
Central Research Laboratory, Hitachi Ltd. Kokubunji, Tokyo 185, Japan
Keywords :
Breakdown voltage; CMOS process; Capacitance; Capacitors; Conductivity; Electrodes; Error analysis; Insulation; Power dissipation; Resistors;
Conference_Titel :
VLSI Technology, 1987. Digest of Technical Papers. Symposium on
Conference_Location :
Karuizawa, Japan
