Title :
A CMOS A/D Converter on Laser Recrystallized SOI with Controlling the Crystal Growth Direction
Author :
Kusunoki, S. ; Sugahara, K. ; Nishimura, T. ; Kumamoto, T. ; Nakaya, M. ; Yazawa, N. ; Horiba, Y.
Author_Institution :
LSI R & D Laboratory, Mitsubishi Electric Corporation 4-1 Misuhara, Itami 664 Japan
Keywords :
Circuits; Crystallization; Crystallography; Etching; MOSFETs; Optical control; Oxidation; Sampling methods; Shape control; Silicon on insulator technology;
Conference_Titel :
VLSI Technology, 1987. Digest of Technical Papers. Symposium on
Conference_Location :
Karuizawa, Japan
