Title :
Resolution and Overlay Precision of a 10 to 1 Step-and-Repeat Projection Printer for VLSI Circuit Fabrication
Author :
Nakase, Makoto ; Shinozaki, Toshiaki
Author_Institution :
Semiconductor Device Engineering Lab. Toshiba Corp., Kawasaki, Kanagawa, 210 Japan
Keywords :
Circuits; Frequency estimation; Lenses; Lithography; Optical device fabrication; Printers; Scanning electron microscopy; Spatial resolution; Throughput; Very large scale integration;
Conference_Titel :
VLSI Technology, 1981. Digest of Technical Papers. Symposium on
Conference_Location :
Maui, HI, USA
