Title :
Submicron MOSFET Structure for Minimizing Channel Hot-Electron Injection
Author :
Takeda, Eiji ; Kume, Hitoshi ; Toyabe, Toru ; Asai, Shojiro
Author_Institution :
Central Research Laboratory, Hitachi, Ltd. Kokubunji, Tokyo, Japan
Keywords :
Channel hot electron injection; Electrodes; Hot carrier injection; Impurities; Laboratories; MOS devices; MOSFET circuits; Secondary generated hot electron injection; Very large scale integration; Voltage;
Conference_Titel :
VLSI Technology, 1981. Digest of Technical Papers. Symposium on
Conference_Location :
Maui, HI, USA