472784

CMOS Technologies for VLSI Circuits

Kohyama, Susumu ; Sato, Tai

Semiconductor Device Engineering Laboratory Toshiba Corporation, Kawasaki, Japan

1981

9-11 Sept. 1981

24

25

CMOS memory circuits; CMOS process; CMOS technology; Capacitance; Geometry; Immune system; MOS devices; Power dissipation; Substrates; Very large scale integration;

English

ieee

VLSI Technology, 1981. Digest of Technical Papers. Symposium on

Maui, HI, USA

conf

4480507