DocumentCode

472788

Title

"Directions in Lithography"

fYear

1981

fDate

9-11 Sept. 1981

Firstpage

32

Lastpage

32

Keywords

Etching; Optical sensors; Resists; Semiconductor devices; Throughput; X-ray lithography;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1981. Digest of Technical Papers. Symposium on

Conference_Location

Maui, HI, USA

Type

conf

Filename

4480511