Title :
High Density Memory Cell Structure
Author :
Itoh, K. ; Sunami, H.
Author_Institution :
Central Research Laboratory, Hitachi Ltd., Tokyo, Japan
Keywords :
Capacitors; Circuit noise; DRAM chips; Electron devices; Laboratories; Manufacturing; Noise reduction; Parasitic capacitance; Random access memory; Very large scale integration;
Conference_Titel :
VLSI Technology, 1981. Digest of Technical Papers. Symposium on
Conference_Location :
Maui, HI, USA
