Title :
Bioconductors - Beyond VLSI
Author :
McAlear, James H. ; Wehrung, John M.
Author_Institution :
EMV Associates, Inc. 15825 Shady Grove Road, Rockville, Maryland 20850
Keywords :
Biological system modeling; Electron beams; Fabrication; Insulation; Lithography; Microstructure; Protein engineering; Resists; Silver; Very large scale integration;
Conference_Titel :
VLSI Technology, 1981. Digest of Technical Papers. Symposium on
Conference_Location :
Maui, HI, USA