• DocumentCode
    472814
  • Title

    Bioconductors - Beyond VLSI

  • Author

    McAlear, James H. ; Wehrung, John M.

  • Author_Institution
    EMV Associates, Inc. 15825 Shady Grove Road, Rockville, Maryland 20850
  • fYear
    1981
  • fDate
    9-11 Sept. 1981
  • Firstpage
    82
  • Lastpage
    83
  • Keywords
    Biological system modeling; Electron beams; Fabrication; Insulation; Lithography; Microstructure; Protein engineering; Resists; Silver; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 1981. Digest of Technical Papers. Symposium on
  • Conference_Location
    Maui, HI, USA
  • Type

    conf

  • Filename
    4480537