DocumentCode
472814
Title
Bioconductors - Beyond VLSI
Author
McAlear, James H. ; Wehrung, John M.
Author_Institution
EMV Associates, Inc. 15825 Shady Grove Road, Rockville, Maryland 20850
fYear
1981
fDate
9-11 Sept. 1981
Firstpage
82
Lastpage
83
Keywords
Biological system modeling; Electron beams; Fabrication; Insulation; Lithography; Microstructure; Protein engineering; Resists; Silver; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1981. Digest of Technical Papers. Symposium on
Conference_Location
Maui, HI, USA
Type
conf
Filename
4480537
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