DocumentCode :
472814
Title :
Bioconductors - Beyond VLSI
Author :
McAlear, James H. ; Wehrung, John M.
Author_Institution :
EMV Associates, Inc. 15825 Shady Grove Road, Rockville, Maryland 20850
fYear :
1981
fDate :
9-11 Sept. 1981
Firstpage :
82
Lastpage :
83
Keywords :
Biological system modeling; Electron beams; Fabrication; Insulation; Lithography; Microstructure; Protein engineering; Resists; Silver; Very large scale integration;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Technology, 1981. Digest of Technical Papers. Symposium on
Conference_Location :
Maui, HI, USA
Type :
conf
Filename :
4480537
Link To Document :
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