Title :
A Complete Process/Device Simulation System and Its Application to the Design of Submicron MOSFETs
Author :
Dang, R. ; Shibata, T. ; Konaka, M. ; Onga, S. ; Kashiwagi, M.
Author_Institution :
Toshiba R & D Center, Toshiba Corporation 72 Horikawa-cho, Saiwai-ku, Kawasaki 210 Japan
Keywords :
Analytical models; Circuit simulation; Circuit testing; Computational modeling; Computer simulation; Design optimization; Fabrication; Integrated circuit modeling; MOS devices; MOSFETs;
Conference_Titel :
VLSI Technology, 1981. Digest of Technical Papers. Symposium on
Conference_Location :
Maui, HI, USA
