472821

Technology Challenges for CMOS VLSI

CMOS Development Team

Texas Instruments Inc. Dallas, Texas 75265 USA

1982

1-3 Sept. 1982

2

5

CMOS process; CMOS technology; Degradation; Instruments; MOS devices; MOSFETs; Production; Read only memory; Transistors; Very large scale integration;

English

ieee

VLSI Technology, 1982. Digest of Technical Papers. Symposium on

Oiso, Japan

conf

4480551