Title :
The SWAMI - A Defect Free and Near-Zero Bird´s Beak Local Oxidation Technology for VLSI
Author :
Chiu, K.Y. ; Fang, R. ; Lin, J. ; Moll, J.L.
Author_Institution :
Hewlett Packard Laboratories 3500 Deer Creek Road, Palo Alto, CA 94304
Keywords :
Anisotropic magnetoresistance; Geometry; Isolation technology; Laboratories; Oxidation; Silicon; Stress; Substrates; Very large scale integration; Wet etching;
Conference_Titel :
VLSI Technology, 1982. Digest of Technical Papers. Symposium on
Conference_Location :
Oiso, Japan
