• DocumentCode
    472846
  • Title

    Characterization and Optimization of a Laser Fusing Technology for VLSI Memories

  • Author

    Shiozaki, M. ; Hashimoto, K. ; Morita, S. ; Hishioka, K. ; Nishimura, H.

  • Author_Institution
    Toshiba Corp. Kawasaki, Japan
  • fYear
    1982
  • fDate
    1-3 Sept. 1982
  • Firstpage
    58
  • Lastpage
    59
  • Keywords
    CMOS technology; Explosions; Fuses; Internal stresses; Laser beams; Laser theory; Optimized production technology; Passivation; Silicon compounds; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 1982. Digest of Technical Papers. Symposium on
  • Conference_Location
    Oiso, Japan
  • Type

    conf

  • Filename
    4480577
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=472846