Title :
Fully Automated LSI Fabrication Technology Using Wafer Cassette Transportation System
Author :
Miyake, Masayasu ; Sato, Yoshiyuki ; Asakawa, Makoto ; Harada, Hiroyuki
Author_Institution :
Musashino Electrical Communication Laboratory, N.T.T. Musashino, Tokyo, 180 Japan
Abstract :
Fully automated LSI fabrication technology has been developed using c-c fabrication equipments and wafer cassette transportation system. A fully automated LSI fabrication line can be constructed by extending the technologies established in the present work.
Keywords :
Automatic control; Automation; Computer networks; Control systems; Controllability; Fabrication; Ion beams; Ion implantation; Large scale integration; Transportation;
Conference_Titel :
VLSI Technology, 1982. Digest of Technical Papers. Symposium on
Conference_Location :
Oiso, Japan
