Title :
The Selective Annealing Technique : An-Overview
Author :
Inge, J. Col ; Demoulin, E. ; Bensahel, D. ; Auvert, C.
Author_Institution :
C.N.E.T. - C.N.S. B.P. 42, 38240 Meylan, France
Keywords :
Annealing; Coatings; Crystals; Dielectric substrates; Grain boundaries; Optical coupling; Power lasers; Shape control; Silicon; Temperature;
Conference_Titel :
VLSI Technology, 1982. Digest of Technical Papers. Symposium on
Conference_Location :
Oiso, Japan
