DocumentCode

472858

Title

New UV Resists with Negative or Positive Tone

Author

Ito, Hiroshi ; Willson, C. Grant ; Frechet, Jean H.J.

Author_Institution

IBM Research Laboratory San Jose, California 95193, U.S.A.

fYear

1982

fDate

1-3 Sept. 1982

Firstpage

86

Lastpage

87

Keywords

Character generation; Couplings; Degradation; Indium tin oxide; Inhibitors; Laboratories; Petroleum; Photochemistry; Polymer films; Resists;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1982. Digest of Technical Papers. Symposium on

Conference_Location

Oiso, Japan

Type

conf

Filename

4480589