DocumentCode

472861

Title

Fine-Line High-Speed Excimer Laser Lithography

Author

Jain, K. ; Willson, C.G. ; Lin, B.J.

Author_Institution

IBM Research Laboratory San Jose, California 95193

fYear

1982

fDate

1-3 Sept. 1982

Firstpage

92

Lastpage

93

Keywords

Laser beams; Laser excitation; Laser modes; Laser transitions; Lithography; Optical pulses; Power lasers; Resists; Spatial coherence; Speckle;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1982. Digest of Technical Papers. Symposium on

Conference_Location

Oiso, Japan

Type

conf

Filename

4480592