DocumentCode :
472878
Title :
Super Self-Aligned Bipolar Technology
Author :
Sakai, T. ; Suzuki, M.
Author_Institution :
Atsugi Electrical Communication Laboratory, NTT 1839, Ono, Atsugi-shi, Kanagawa, Japan
fYear :
1983
fDate :
13-15 Sept. 1983
Firstpage :
16
Lastpage :
19
Keywords :
Electrodes; Fabrication; Frequency conversion; Integrated circuit technology; Large scale integration; Logic; Optical buffering; Propagation delay; Read-write memory; Very large scale integration;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Technology, 1983. Digest of Technical Papers. Symposium on
Conference_Location :
Maui, HI, USA
Print_ISBN :
4-930813-05-0
Type :
conf
Filename :
4480617
Link To Document :
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