Title :
New U-Groove Isolation Technology for High-Speed Bipolar Memory
Author :
Tamaki, Y. ; Shiba, T. ; Honma, N. ; Mizuo, S. ; Hayasaka, A.
Author_Institution :
Central Research Laboratory, Hitachi Ltd. Kokubunji, Tokyo 185, Japan
Keywords :
Capacitance; Circuit testing; Computer simulation; Delay effects; Diodes; Isolation technology; Laboratories; Lithography; Low voltage; Random access memory;
Conference_Titel :
VLSI Technology, 1983. Digest of Technical Papers. Symposium on
Conference_Location :
Maui, HI, USA
Print_ISBN :
4-930813-05-0
