مرکز منطقه ای اطلاع رساني علوم و فناوري

DocumentCode :

472884

Title :

"Isolation Technique for VLSI"

fYear :

1983

fDate :

13-15 Sept. 1983

Firstpage :

Lastpage :

Keywords :

Epitaxial growth; Insulation; Isolation technology; National electric code; Oxidation; Photochemistry; Substrates; Very large scale integration;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

VLSI Technology, 1983. Digest of Technical Papers. Symposium on

Conference_Location :

Maui, HI, USA

Print_ISBN :

4-930813-05-0

Type :

conf

Filename :

4480623

Link To Document :