Title :
Computer Aided Research Automation System for Advanced VLSI
Author :
Funakoshi, Kiyohiko ; Izawa, Ryuichi ; Isaka, Mitsuaki ; Matsuda, Masatoshi ; Hirosawa, Toshio ; Hashimoto, Norikazu ; Asai, Shojiro
Author_Institution :
Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo, Japan
Keywords :
Automatic control; Automation; Control systems; Data analysis; Furnaces; Laboratories; Process control; Semiconductor device measurement; Thickness measurement; Very large scale integration;
Conference_Titel :
VLSI Technology, 1983. Digest of Technical Papers. Symposium on
Conference_Location :
Maui, HI, USA
Print_ISBN :
4-930813-05-0
