• DocumentCode
    472904
  • Title

    An Aerial Image Model with Applications to Contrast-Enhanced Lithography

  • Author

    Griffing, B.F. ; Lorensen, W.E.

  • Author_Institution
    General Electric Corporate Research and Development Center Schenectady, N. Y.
  • fYear
    1983
  • fDate
    13-15 Sept. 1983
  • Firstpage
    76
  • Lastpage
    77
  • Keywords
    Application software; Bleaching; Computational modeling; Computer graphics; Image resolution; Lithography; Motion pictures; Optical filters; Photobleaching; Resists;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 1983. Digest of Technical Papers. Symposium on
  • Conference_Location
    Maui, HI, USA
  • Print_ISBN
    4-930813-05-0
  • Type

    conf

  • Filename
    4480644