DocumentCode
472904
Title
An Aerial Image Model with Applications to Contrast-Enhanced Lithography
Author
Griffing, B.F. ; Lorensen, W.E.
Author_Institution
General Electric Corporate Research and Development Center Schenectady, N. Y.
fYear
1983
fDate
13-15 Sept. 1983
Firstpage
76
Lastpage
77
Keywords
Application software; Bleaching; Computational modeling; Computer graphics; Image resolution; Lithography; Motion pictures; Optical filters; Photobleaching; Resists;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1983. Digest of Technical Papers. Symposium on
Conference_Location
Maui, HI, USA
Print_ISBN
4-930813-05-0
Type
conf
Filename
4480644
Link To Document