Title :
Hot-Carrir Effects in Submicron VLSIs
Author :
Takada, Eiji ; Kume, Hitoshi ; Yoshinobu ; Suzuki, Norio ; Asai, Shojiro ; Hagiwara, Takaaki
Author_Institution :
Central Research Laboratory, Hitachi Ltd., Kokubunji, Tokyo 185, Japan
Keywords :
Current measurement; Degradation; Hot carrier effects; Hot carrier injection; Hot carriers; Impact ionization; Stress; Temperature dependence; Very large scale integration; Voltage;
Conference_Titel :
VLSI Technology, 1983. Digest of Technical Papers. Symposium on
Conference_Location :
Maui, HI, USA
Print_ISBN :
4-930813-05-0