Title :
A Buried Giga-Ohm Resistor(BGR) Load Static RAM Cell
Author :
Sakai, Yoshio ; Hayashida, Tetsuya ; Nagai, Ryo ; Yamamoto, Schuichi ; Yamanaka, Toshiaki ; Kure, Tokuo ; Minato, Osamu
Author_Institution :
Central Research Laboratory, Hitachi Ltd. Kokubunji, Tokyo 185, Japan
Keywords :
Batteries; CMOS process; CMOS technology; Laboratories; Random access memory; Read-write memory; Resistors; Semiconductor films; Silicon; Voltage;
Conference_Titel :
VLSI Technology, 1984. Digest of Technical Papers. Symposium on
Conference_Location :
San Diego, CA, USA
Print_ISBN :
4-930813-08-5
