Title :
Wiring Capacitance Simulation in Two and Three Dimensions
Author :
Fukuma, Masao ; Uebbing, Reinhold H.
Author_Institution :
Microelectronics Res. Labs. NEC Corporation 4-1-1 Miyazaki, Miyamae-ku, Kawasaki, Japan
Keywords :
Circuit simulation; Dielectrics; Mesh generation; Microelectronics; National electric code; Parasitic capacitance; Poisson equations; Very large scale integration; Wire; Wiring;
Conference_Titel :
VLSI Technology, 1984. Digest of Technical Papers. Symposium on
Conference_Location :
San Diego, CA, USA
Print_ISBN :
4-930813-08-5
