DocumentCode :
472947
Title :
Characterization of Bipolar Transistors with Polysilicon Emitter Contacts
Author :
Patton, Gary L. ; Bravman, Jolhn C. ; Plummer, James D.
Author_Institution :
Integrated Circuits Laboratory Stanford University, Stanford, CA 9430
fYear :
1984
fDate :
10-12 Sept. 1984
Firstpage :
54
Lastpage :
55
Keywords :
Bipolar transistors; Chemicals; Electric variables; Electron emission; Silicon; Substrates; Surface cleaning; Surface treatment; Thickness measurement; Tunneling;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Technology, 1984. Digest of Technical Papers. Symposium on
Conference_Location :
San Diego, CA, USA
Print_ISBN :
4-930813-08-5
Type :
conf
Filename :
4480696
Link To Document :
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