Title :
Characterization of Bipolar Transistors with Polysilicon Emitter Contacts
Author :
Patton, Gary L. ; Bravman, Jolhn C. ; Plummer, James D.
Author_Institution :
Integrated Circuits Laboratory Stanford University, Stanford, CA 9430
Keywords :
Bipolar transistors; Chemicals; Electric variables; Electron emission; Silicon; Substrates; Surface cleaning; Surface treatment; Thickness measurement; Tunneling;
Conference_Titel :
VLSI Technology, 1984. Digest of Technical Papers. Symposium on
Conference_Location :
San Diego, CA, USA
Print_ISBN :
4-930813-08-5