Title :
Image Enhancement in High-Resoltuion Lithography Through Polymer Grafting Techniques
Author :
Steckl, A.J. ; Moore, J.A. ; Corelli, J.C. ; Liu, W.T.
Author_Institution :
Center for Integrated Electronics Rensselaer Polytechnic Institute Troy, NY 12181
Keywords :
Image enhancement; Ion beams; Laboratories; Lithography; Polymers; Protons; Resists; Scanning electron microscopy; Throughput; X-ray imaging;
Conference_Titel :
VLSI Technology, 1984. Digest of Technical Papers. Symposium on
Conference_Location :
San Diego, CA, USA
Print_ISBN :
4-930813-08-5
