DocumentCode

472952

Title

Holographic Submicron Photolithography

Author

Nomura, N. ; Kawakita, K. ; Takemoto, T. ; Matsumura, T. ; Yonezawa, T. ; Kugimiya, K.

Author_Institution

Central Research Laboratories Matsushita Electric Industrial Co., Ltd. Moriguchi, Osaka 570, Japan

fYear

1984

fDate

10-12 Sept. 1984

Firstpage

64

Lastpage

65

Keywords

Circuits; Diffraction gratings; Holography; Interference; Laser beams; Lithography; Resists; Space technology; Standards development; Wiring;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1984. Digest of Technical Papers. Symposium on

Conference_Location

San Diego, CA, USA

Print_ISBN

4-930813-08-5

Type

conf

Filename

4480701