DocumentCode

472957

Title

Characterization of Submicrometer Buried-Channel and Surface-Channel PMOSFETS

Author

Yoshimi, M. ; Wada, T. ; Takahashi, M. ; Numata, K. ; Kawabuchi, K.

Author_Institution

VLSI Research Center, Toshiba Corporation 1 Komukai, Toshiba-cho, Saiwai-ku, Kawasaki 210, Japan

fYear

1984

fDate

10-12 Sept. 1984

Firstpage

76

Lastpage

77

Keywords

Character generation; Circuits; Controllability; Hot carriers; Implants; Ionization; MOSFETs; Stress; Threshold voltage; Very large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1984. Digest of Technical Papers. Symposium on

Conference_Location

San Diego, CA, USA

Print_ISBN

4-930813-08-5

Type

conf

Filename

4480707