Title :
Characterization of Intrinsic Capacitances of Small-Geometry MOSFET´s
Author :
Sheu, B.J. ; Ko, P.K. ; Hsu, F.-C.
Author_Institution :
University of California. Berkeley, Ca 94E720
Keywords :
Capacitance measurement; Circuits; Geometry; Laboratories; MOSFETs; Parasitic capacitance; Probes; Testing; Very large scale integration; Voltage;
Conference_Titel :
VLSI Technology, 1984. Digest of Technical Papers. Symposium on
Conference_Location :
San Diego, CA, USA
Print_ISBN :
4-930813-08-5
