DocumentCode
472963
Title
Integrated Circuits Fabricated on Multiple Silicon - Insulator Structures
Author
Sugiura, S. ; Yoshida, T. ; Kaneko, Y. ; Shono, K. ; Dumin, P.J.
Author_Institution
Sophia University Tokyo, Japan
fYear
1984
fDate
10-12 Sept. 1984
Firstpage
88
Lastpage
89
Keywords
Annealing; Delay effects; Etching; Inductors; Insulation; Ring oscillators; Semiconductor films; Silicon on insulator technology; Substrates; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1984. Digest of Technical Papers. Symposium on
Conference_Location
San Diego, CA, USA
Print_ISBN
4-930813-08-5
Type
conf
Filename
4480713
Link To Document