DocumentCode :
472963
Title :
Integrated Circuits Fabricated on Multiple Silicon - Insulator Structures
Author :
Sugiura, S. ; Yoshida, T. ; Kaneko, Y. ; Shono, K. ; Dumin, P.J.
Author_Institution :
Sophia University Tokyo, Japan
fYear :
1984
fDate :
10-12 Sept. 1984
Firstpage :
88
Lastpage :
89
Keywords :
Annealing; Delay effects; Etching; Inductors; Insulation; Ring oscillators; Semiconductor films; Silicon on insulator technology; Substrates; Threshold voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Technology, 1984. Digest of Technical Papers. Symposium on
Conference_Location :
San Diego, CA, USA
Print_ISBN :
4-930813-08-5
Type :
conf
Filename :
4480713
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=472963
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