Development of planar components using advanced fabrication

As the importance of intelligent transport system (ITS) and imaging diagnostics increases, the fabrication of high performance millimeter-wave planar components becomes essential. This paper describes the development of high performance millimeter-wave planar components such as antennas using a low-loss fluorine substrate. The problems to be solved are the low degree of adhesion between copper foil and the fluorine substrate and the shape of the antenna pattern. In order to solve the problems, surface treatment of fluorine films and a fabrication method using electro fine forming (EF2) are utilized.