Title :
TCADMEMS Overview
Author :
Peyrou, D. ; Achkar, I. ; Pennec, F. ; Coccetti, F. ; Ahmad, M. Al ; Pons, P. ; Plana, R.
Author_Institution :
LAAS-CNRS, Univ. of Toulouse, Toulouse
fDate :
Oct. 15 2007-Sept. 17 2007
Abstract :
This paper presents an overview of the important issues in the field of TCAD MEMS. It will be shown different techniques to investigate the materials properties of MEMS and their impact on the RF MEMS characteristics. Multi-physic simulation are presented to predict the initial deformation of MEMS based membrane and to predict the capacitive and DC contact characteristics of RF MEMS.
Keywords :
micromechanical devices; technology CAD (electronics); DC contact characteristics; RF MEMS characteristics; TCAD MEMS; Multi-physics simulation; RF MEMS; Roughness; Young modulus; contact properties; material properties;
Conference_Titel :
Semiconductor Conference, 2007. CAS 2007. International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-0847-4
DOI :
10.1109/SMICND.2007.4519639
