• DocumentCode
    474286
  • Title

    TCADMEMS Overview

  • Author

    Peyrou, D. ; Achkar, I. ; Pennec, F. ; Coccetti, F. ; Ahmad, M. Al ; Pons, P. ; Plana, R.

  • Author_Institution
    LAAS-CNRS, Univ. of Toulouse, Toulouse
  • Volume
    1
  • fYear
    2007
  • fDate
    Oct. 15 2007-Sept. 17 2007
  • Firstpage
    21
  • Lastpage
    24
  • Abstract
    This paper presents an overview of the important issues in the field of TCAD MEMS. It will be shown different techniques to investigate the materials properties of MEMS and their impact on the RF MEMS characteristics. Multi-physic simulation are presented to predict the initial deformation of MEMS based membrane and to predict the capacitive and DC contact characteristics of RF MEMS.
  • Keywords
    micromechanical devices; technology CAD (electronics); DC contact characteristics; RF MEMS characteristics; TCAD MEMS; Multi-physics simulation; RF MEMS; Roughness; Young modulus; contact properties; material properties;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 2007. CAS 2007. International
  • Conference_Location
    Sinaia
  • ISSN
    1545-827X
  • Print_ISBN
    978-1-4244-0847-4
  • Type

    conf

  • DOI
    10.1109/SMICND.2007.4519639
  • Filename
    4519639
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=474286