Title :
Design and Finite Element Simulation of MEMS for Fatigue Test
Author :
De Pasquale, G. ; Soma, A.
Author_Institution :
Mech. Dept., Politec. di Torino, Torino
fDate :
Oct. 15 2007-Sept. 17 2007
Abstract :
Design and modelling of test structures for the analysis of fatigue damage occurring in oscillating microstructures is presented. F.E.M. models are realized to optimize specimen shapes and electro-mechanical actuation parameters. Two different structural geometries are defined to realize both traction and shear tensile specimen actuations through the actuation of out-of-plane movable plates.
Keywords :
fatigue; fatigue testing; finite element analysis; micromechanical devices; traction; MEMS; electro-mechanical actuation parameters; fatigue damage; fatigue test; finite element simulation; oscillating microstructures; shear tensile specimen actuations; traction; Fatigue; Finite element methods; Geometry; Gold; Micromechanical devices; Microscopy; Microstructure; Silicon; Testing; Voltage; fatigue damage; gold technology; interferometric microscope; shear; stress; traction;
Conference_Titel :
Semiconductor Conference, 2007. CAS 2007. International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-0847-4
DOI :
10.1109/SMICND.2007.4519671
