DocumentCode
474308
Title
Design and Finite Element Simulation of MEMS for Fatigue Test
Author
De Pasquale, G. ; Soma, A.
Author_Institution
Mech. Dept., Politec. di Torino, Torino
Volume
1
fYear
2007
fDate
Oct. 15 2007-Sept. 17 2007
Firstpage
159
Lastpage
162
Abstract
Design and modelling of test structures for the analysis of fatigue damage occurring in oscillating microstructures is presented. F.E.M. models are realized to optimize specimen shapes and electro-mechanical actuation parameters. Two different structural geometries are defined to realize both traction and shear tensile specimen actuations through the actuation of out-of-plane movable plates.
Keywords
fatigue; fatigue testing; finite element analysis; micromechanical devices; traction; MEMS; electro-mechanical actuation parameters; fatigue damage; fatigue test; finite element simulation; oscillating microstructures; shear tensile specimen actuations; traction; Fatigue; Finite element methods; Geometry; Gold; Micromechanical devices; Microscopy; Microstructure; Silicon; Testing; Voltage; fatigue damage; gold technology; interferometric microscope; shear; stress; traction;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2007. CAS 2007. International
Conference_Location
Sinaia
ISSN
1545-827X
Print_ISBN
978-1-4244-0847-4
Type
conf
DOI
10.1109/SMICND.2007.4519671
Filename
4519671
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