Title :
SiO2-TiO2 Undoped or (Er3+) Doped Thin Layers for Integrate Optics Prepared by Sol-Gel Method
Author :
Zaharescu, Maria ; Cristea, Dana ; Obreja, Paula ; Predoana, L. ; Gartner, M. ; Anastasescu, M.
Author_Institution :
Inst. of Phys. Chem. "Hie Murgulescu", Romanian Acad. of Sciencies, Bucharest
fDate :
Oct. 15 2007-Sept. 17 2007
Abstract :
The multilayer silica-titania waveguides undoped and doped with Er + were prepared by sol- gel method. The selected molar composition was 90%SiO2-10%TiO2 and the films were deposited on Si/SiO2 substrate by dip coating and by spin coating methods, followed by annealing at 900 C. The films were characterized by SE in the range of 300-700 nm. Differences were noticed depending on the method of deposition and number of layers deposited. Optical waveguides and photonic circuits (microring resonators) were obtained by patterning Er-doped SiO2-TiO2 sol-gel layers deposited on oxidized silicon wafers (oxide thickness over 1700 nm).
Keywords :
annealing; dip coating; integrated optics; optical waveguides; semiconductor doping; semiconductor thin films; sol-gel processing; spin coating; annealing; dip coating; doped thin layers; integrated optics; molar composition; multilayer silica-titania waveguides; optical waveguides; photonic circuits; sol-gel method; spin coating; Annealing; Circuits; Dip coating; Erbium; Nonhomogeneous media; Optical films; Optical resonators; Optical waveguides; Semiconductor films; Silicon;
Conference_Titel :
Semiconductor Conference, 2007. CAS 2007. International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-0847-4
DOI :
10.1109/SMICND.2007.4519684
