Title :
Analysis of resolution and feature size in extreme ultraviolet microscopy images
Author :
Marconi, M.C. ; Wachulak, P.W. ; Brewer, C. ; Brizuela, F. ; Bartels, R. ; Menoni, C.S. ; Rocca, J.J. ; Anderson, E. ; Chao, Weilun
Author_Institution :
NSF Eng. Res. Center for Extreme Ultraviolet Sci. & Technol. & Electr. & Comput. Eng. Dept., Colorado State Univ., Fort Collins, CO
Abstract :
We describe a correlation algorithm that allows for the simultaneous determination of object size and resolution in images of nanoscale objects. The method was used to analyze images recorded with a 13.2 nm laser.
Keywords :
image processing; image resolution; optical correlation; optical images; optical microscopy; correlation algorithm; extreme ultraviolet microscopy images; image resolution; nanoscale objects; wavelength 13.2 nm; Gratings; Image analysis; Image resolution; Instruments; Optical microscopy; Optical recording; Scanning electron microscopy; Spatial resolution; Ultraviolet sources; X-ray imaging; 100.2000 (Digital image processing); 100.2960 (Image analysis); 110.0180 (Microscopy); 110.7440 (X-ray imaging);
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9
