Title :
Modular control system for a magnetic levitated stage
Author :
Caraiani, Mitica ; Jeon, Jeong-Woo ; Oh, Hyeon-Seok
Author_Institution :
Korea Electrotechnol. Res. Inst., Changwon
Abstract :
We developed a magnetic levitated stage system, which allows precise positioning in six DoFs, with only one mover. It requires control of force in many points. Besides, the number of controlled points can vary with the travel range. For these reasons, a modular concept for the control and driving system is required. The paper presents the way in which the modularity is obtained in terms of control algorithm, embedded computing and driving.
Keywords :
force control; magnetic levitation; nonlinear control systems; position control; precision engineering; control algorithm; magnetic levitated stage system; modular control system; offeree control; precise positioning; Capacitive sensors; Coils; Control systems; Embedded computing; Fabrication; Force control; Magnetic fields; Magnetic levitation; Magnetic sensors; Motion control;
Conference_Titel :
Automation, Quality and Testing, Robotics, 2008. AQTR 2008. IEEE International Conference on
Conference_Location :
Cluj-Napoca
Print_ISBN :
978-1-4244-2576-1
Electronic_ISBN :
978-1-4244-2577-8
DOI :
10.1109/AQTR.2008.4588797
