DocumentCode :
475386
Title :
Fabrication of eyepieces lenses scale for optical microscope
Author :
Atthi, Nithi ; Meerot, Somchai ; Keawpoonsuk, Anucha ; Jeamsaksiri, Wutthinan ; Hruanun, Charndet ; Poyai, Amporn
Author_Institution :
Thai Microelectron. Center, Amphur Muang
Volume :
1
fYear :
2008
fDate :
14-17 May 2008
Firstpage :
525
Lastpage :
528
Abstract :
Nowadays, eyepiece lenses in optical microscope have microscales so-called reticles or eyepiece lens scale. They are located at the focal plane inside the eyepiece lens of the microscope and allow an inspector to make accurate measurements of specimens. The scale of micrometer on eyepiece lens can be produced by using photolithography process. In this paper, both linear micrometer and circular frame micrometer have been investigated. The results show that such a TMEC patterning process can be controlled to achieve the linewidth pattern on the photomask and eyepiece lens glasses as its design specification. This invention facilitates the users in the local laboratories and industries who use the optical microscope in a daily basis.
Keywords :
lenses; masks; optical design techniques; optical fabrication; optical glass; optical microscopes; photolithography; TMEC patterning process; circular frame micrometer; eyepiece lens fabrication; eyepiece lens glass; focal plane; linear micrometer; optical microscope; photolithography process; photomask; reticles; Focusing; Laboratories; Lenses; Lighting control; Lithography; Microelectronics; Optical device fabrication; Optical filters; Optical microscopy; Physics; Eyepiece lens scale; Optical Microscope; Photolithography; Photomask;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology, 2008. ECTI-CON 2008. 5th International Conference on
Conference_Location :
Krabi
Print_ISBN :
978-1-4244-2101-5
Electronic_ISBN :
978-1-4244-2102-2
Type :
conf
DOI :
10.1109/ECTICON.2008.4600486
Filename :
4600486
Link To Document :
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